CMOS Compatible High Power Erbium Doped Distributed Feedback Lasers
نویسندگان
چکیده
On chip, high power (75mW), erbium-doped distributed feedback lasers are demonstrated in a CMOS compatible fabrication flow. The laser cavities consist of silicon nitride waveguide and grating features defined by wafer-scale immersion lithography and a top erbiumdoped aluminum oxide layer deposited as the final step in the fabrication process. 2013 Optical Society of America OCIS codes: (130.0130) Integrated optics; (130.2790) Guided waves; (130.3120) Integrated optics devices; (140.3460) Lasers.
منابع مشابه
CMOS-compatible 75 mW erbium-doped distributed feedback laser.
On-chip, high-power, erbium-doped distributed feedback lasers are demonstrated in a CMOS-compatible fabrication flow. The laser cavities consist of silicon nitride waveguide and grating features, defined by wafer-scale immersion lithography and an erbium-doped aluminum oxide layer deposited as the final step in the fabrication process. The large mode size lasers demonstrate single-mode continuo...
متن کاملArrayed narrow linewidth erbium-doped waveguide-distributed feedback lasers on an ultra-low-loss silicon-nitride platform.
We demonstrate an array of erbium-doped waveguide-distributed feedback lasers on an ultra-low-loss Si(3)N(4) platform. Sidewall gratings providing the lasing feedback are defined in the silicon-nitride layer using 248 nm stepper lithography, while the gain is provided by a reactive co-sputtered erbium-doped aluminum-oxide layer. We observe lasing output over a 12 nm wavelength range (1531-1543 ...
متن کاملRegenerated distributed Bragg reflector fiber lasers for high-temperature operation.
This Letter presents distributed Bragg reflector (DBR) fiber lasers for high-temperature operation at 750°C. Thermally regenerated fiber gratings were used as the feedback elements to construct an erbium-doped DBR fiber laser. The output power of the fiber laser can reach 1 mW at all operating temperatures. The output power fluctuation tested at 750°C was 1.06% over a period of 7 hours. The the...
متن کاملErbium-doped waveguide DBR and DFB laser arrays integrated within an ultra-low-loss Si3N4 platform.
Record low optical threshold power and high slope efficiency are reported for arrays of distributed Bragg reflector lasers integrated within an ultra-low-loss Si(3)N(4) planar waveguide platform. Additionally, arrays of distributed feedback laser designs are presented that show improvements in pump-to-signal conversion efficiency of over two orders of magnitude beyond that found in previously p...
متن کاملConcentration-induced nonuniform power in tunable erbium-doped fiber lasers.
We report, for the first time to our knowledge, the presence of concentration-induced nonuniform power in tunable erbium-doped fiber lasers. A theoretical model is proposed with pair-induced quenching taken into account. We obtain good agreement between numerical and experimental results of a high-concentration erbium-doped fiber ring laser with a large tuning range of over 100 nm. These findin...
متن کامل